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Phosphorus diffused LPCVD polysilicon passivated contacts

Phosphorus diffused LPCVD polysilicon passivated contacts

We present a passivated contact technology based on polysilicon deposited using low pressure chemical vapour deposition (LPCVD) over an ultra-thin silicon dioxide layer, which achieves an excellent surface passivation with implied open-circuit voltage of 735 mV, a recombination prefactor below 1 fA cm−2 and contact resistivity below 1 mΩcm2.

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