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Impact of Al Doping on Surface Passivation of TiOx
Apr 13, 2020|
In this work, we find that the crystallization of ALD TiOx is very sensitive to the film’s thickness, where a small increase in TiOx thickness can trigger a phase change from amorphous TiOx into anatase, which causes a significant increase in J0s. More importantly, we demonstrate that the incorporation of Al ions into the TiOx films inhibits crystallization, which in turn retains excellent passivation for thicker TiOx.